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PH₃
Phosphine
Ultra-high-purity liquefied phosphine for controlled doping, deposition and advanced material processes.
6N99.9999% Ultra High Purity
- Product Form
- Liquefied phosphine
- Packaging
- Specialty gas cylinders and customized options
- Applications
- Controlled doping processes, Thin-film and material deposition, Advanced material production
Product Overview
Phosphine (PH₃) is supplied as an ultra-high-purity electronic specialty gas. The values below are based on the product information provided by NextPure and remain editable.
EDITABLE SPECIFICATION
Impurity Specifications
Editable typical specifications. Confirm all values against the current NextPure datasheet, COA and supply agreement before publication.
| Impurities | Specification |
|---|---|
| Nitrogen (N₂) | <250 ppbv |
| Oxygen & Argon (O₂ + Ar) | <100 ppbv |
| Carbon Dioxide (CO₂) | <50 ppbv |
| Carbon Monoxide (CO) | <100 ppbv |
| Methane (CH₄) | <100 ppbv |
| Moisture (H₂O) | <100 ppbv |
| Arsine (AsH₃) | <100 ppbv |
Key Features
- Ultra-high purity product
- Ultra-low impurity control
- Reliable and consistent quality
- Traceable quality documentation
- Customized packaging and supply options
Typical Applications
- Controlled doping processes
- Thin-film and material deposition
- Advanced material production
- Research and development
Packaging Options
- Specialty gas cylinders
- Multiple cylinder capacities
- Valve connection selected by market and application
- Customized packaging available on request
Safety & Handling Notice
Consult the current SDS before handling. Use approved equipment, engineering controls and trained personnel.