PH₃ / H₂
Phosphine / Hydrogen Mixture
Ultra-high purity phosphine diluted in hydrogen for semiconductor, epitaxy and advanced process applications.
Available across project-specific concentrations
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Gas Mixtures
Precision Gas Mixtures for Advanced Manufacturing
NextPure supplies ultra-high purity specialty gas mixtures for semiconductor manufacturing, LED, photovoltaic, research and advanced industrial processes. Mixtures are available in a wide range of concentrations and balance gases to support process, calibration and analytical requirements.
PH₃ / N₂
Phosphine / Nitrogen Mixture
Stable phosphine-in-nitrogen mixtures for process, calibration and analytical applications.
Available across project-specific concentrations
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PH₃ Full Series
10 ppm – 10% PH₃ Mixtures
Complete phosphine concentration coverage from low-ppm analytical mixtures to percent-level process mixtures.
10 ppm to 10%
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AsH₃ / H₂
Arsine / Hydrogen Mixture
High-purity arsine diluted in hydrogen for compound semiconductor and advanced manufacturing applications.
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AsH₃ / N₂
Arsine / Nitrogen Mixture
Precision arsine-in-nitrogen mixtures for analytical, calibration and specialty gas applications.
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HCl Series
Hydrogen Chloride Mixtures
Hydrogen chloride mixtures available with nitrogen or hydrogen balance gas for cleaning, etching and advanced process applications.
HCl / N₂ • HCl / H₂
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Why NextPure
Reliable Gas Mixtures for Critical Processes
Precise Concentration Control
Gas mixture concentrations can be prepared for ppm-level calibration through percent-level process requirements.
UHP Source Gases
High-purity source gases and balance gases support demanding semiconductor and advanced manufacturing applications.
10 ppm to 10% PH₃ Range
The PH₃ family covers a broad concentration range for analytical, calibration and process applications.
Flexible Balance Gases
Hydrogen and nitrogen balance-gas options are available across key phosphine, arsine and hydrogen chloride series.
COA & Traceability
Product documentation and certificate-of-analysis support can be supplied according to project requirements.
Custom Mixture Support
Custom concentration, cylinder and connection requirements can be reviewed with our technical team.
Custom Mixtures
Looking for a Specific Gas Mixture?
Tell us the gas species, balance gas, target concentration, cylinder size and connection requirement. NextPure can help define an appropriate gas mixture configuration.